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Subject: Reactive ion etching (RIE) tool
Solicitation Number: 6-MO34-Q-00321-00
Notice Type: SOLICIT
NAICS: 54171
Notice Published: 06-17-26
Response Due: 06-24-26

Agency: Department of Energy
Office: ENERGY, DEPARTMENT OF
Contact: Michael Oprondek This email address is being protected from spambots. You need JavaScript enabled to view it. Ph: (630) 252-7069
Office Address: Lemont, IL 60439



Click for official SAM (FBO) notice, additional information, and accompanying attachments

Reactive ion etching (RIE) tool